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Home > Adaptive Optical Systems > 14MMDM-15-17 - Deformable Mirror with Integrated Tip-Tilt Stage
Deformable Mirror with Integrated Tip-Tilt Stage
Fabricated using silicon bulk micromachining technology
 
Built-in piezoelectric Tilt-Tip Stage
 
Different coatings available upon request


Standard micro machined deformable mirror with 15-mm clear aperture, 17 actuators and integrated tip-tilt stage has been specially designed for correction of low-order aberrrations. The deformable mirror has the actuator geometry optimized for the correction of the low-order aberrations, with 12 actuators located outside of the working aperture of 10 mm, and is mounted on a piezoelectric tip-tilt stage. This allows to avoid the double use of the pupil-conjugated plane and to build compact and simple adaptive optical systems. The mirror has tip and tilt range of 24 µm at 10 mm aperture and 8.8 µm defocus range in the reflected wavefront.

Standard Specifications
Aperture shapeapproximately circular
Mirror coatingAl or Au
Aperture dimensions15 mm diameter
Number of electrodes17
Control voltages Vc0 . . . 235 V
Initial RMS deviation from planeless than 0.2 µm
Main initial aberration1.5 fringes at 630 nm
Maximum deflection of the mirror center9.4 µm

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